POWERGLIDE offers several communication protocols including EtherCAT®, which is optimized for the semiconductor manufacturing industry.
Features and Benefits
Built-in automatic calibration algorithm
Eliminates downtime associated with calibration
High TCR heater materials based temperature control
Allows closed loop control for all zones
Incorporates ceramic control algorithms
Maintains the limitations of the materials to protect the pedestal
Provides programmable, state-based PID control
EtherCAT® communications protocol
Ensures adherence to industry standard protocols